Authors: T. Jiang, C. Kellon and R.D. Blanton
Affilation: Carnegie Mellon University, United States
Pages: 498 - 501
Keywords: microresonator, particulate contaminations, defect classification, MEMS test
We study the failure mechanisms of a microresonator. A MEMs process simulation tool is used to discover the full spectrum of defective structures caused by particulate contaminations introduced during manufacturing. Based on process simulation results, defect categorization is performed. Mechanical and electrical simulation are then used to quantify the misbehaviors associated with the categories of defective structures. The analysis reveals that particulates can cause both parametric and catastrophic changes in behavior. Also, we found types of defects that do not affect mechanical behavior but have a significant impact on electrical behavior.
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