MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems

Implant and Diffusion Modeling Chapter 10

Accurate Three-Dimensional Simulation of Damage Caused by Ion Implantation

Authors: A. Hössinger and S. Selberherr

Affilation: TU Vienna, Austria

Pages: 363 - 366

Keywords: ion implantation, damage, Monte-Carlo simulation

We present a Monte-Carlo ion implantation simulation method that allows a very accurate prediction of implantation induced point defects, generation of amorphous areas, and impurity distributions. The implanted impurity profiles can be calculated as well as the distributions of impurities that are moved from one material to another during the implantation process. The simulation method can be applied to three dimensional device structures consisting of various materials. The accuracy of the simulated profiles is evaluated by comparing impurity profiles with SIMS measurements and point defect profiles with RBS spectra. Finally the simulation results of a source/drain ion implantation into a three-dimensional MOS-transistor structure are shown.

ISBN: 0-9666135-4-6
Pages: 697