Authors: D. Vasileska and D.K. Ferry
Affilation: Arizona State University, United States
Pages: 408 - 413
Keywords: Scaled Si-MOSFETs, threshold voltage, inversion layer capacitance, total gate capacitance, poly-gate depletion
We investigate the influence of poly-gate depletion on the inversion layer capacitance CinV, total gate capacitance CtOt and threshold voltage VT in scaled Si MOSFETs using both semiclassical (SC) and quantum-mechanical (QM) description of the charge density in the channel. We also present an analytical expression for the total gate capacitance CtOt that uses SC charge description and takes into account the depletion of the poly-silicon gates. Our simulations show that poly-gate depletion has larger influence on CtOt than the QM charge description. On the contrary, VT is significantly affected by both the poly-gate depletion and the QM effects in the channel.