Authors: S.F. Bart, N.R. Swart, M. Mariappan, M.H. Zaman and J.R. Gilbert
Affilation: Microcosm Technologies, Inc., United States
Pages: 386 - 391
Keywords: ems, CAD, MEMS, MST, FEM
A comprehensive CAD software environment is presented for MEMS/MST design. It includes MEMS mechanical schematic entry, parameterized cell layout generation, automatic lumped parameter macro-model generation, and LVS style error checking. These tools allow for flexible design includino parameterized-cell layout generation. Lumped parameter macro-models can be generated automatically from 3-D, static, FEM/BEM based device simulations The software environment also provides error checking between different design views. The design environment is illustrated using a differential capacitive-based accelerometer as an example. Efficient, dynamic simulations of this large example system with models based on true ,-D device behavior are shown.
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