MSM 98
MSM 98
Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems

Software Systems and Tools Chapter 8

An Environment for MEMS Design and Verification

Authors: S.F. Bart, N.R. Swart, M. Mariappan, M.H. Zaman and J.R. Gilbert

Affilation: Microcosm Technologies, Inc., United States

Pages: 386 - 391

Keywords: ems, CAD, MEMS, MST, FEM

A comprehensive CAD software environment is presented for MEMS/MST design. It includes MEMS mechanical schematic entry, parameterized cell layout generation, automatic lumped parameter macro-model generation, and LVS style error checking. These tools allow for flexible design includino parameterized-cell layout generation. Lumped parameter macro-models can be generated automatically from 3-D, static, FEM/BEM based device simulations The software environment also provides error checking between different design views. The design environment is illustrated using a differential capacitive-based accelerometer as an example. Efficient, dynamic simulations of this large example system with models based on true ,-D device behavior are shown.

ISBN: 0-96661-35-0-3
Pages: 678