Authors: M. Lang and M. Glesner
Affilation: Darmstadt University of Technology, Germany
Pages: 402 - 407
Keywords: FEM, Layout, Interface, bidirectional
This paper reports of the CAD-tool FELLINI, which supports the design of microsysfems on the lower levels of abstraction. FELLINI provides a bidirectional interface between the structural and the layout level. A Layout-to-FEM converter as well as a FEM-to-Layout converter are integrated into FELLINI. These modules enable a fast and easy realization of user specific designs. FELLII\I uses existing CAD tools for microelectronics and mechanics providing interfaces adapted to the needs of MEMS design. The use of FELLINI is demonstrated with the design of an acceleration sensor, which has been fabricated in a commercial CMOS process. This sensor can be used as parametric standard cell and adapted with FELLINI in order to meet user specific constraints.
Nanotech Conference Proceedings are now published in the TechConnect Briefs