MSM 98
MSM 98
Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems

Discretization, Numerics, Computational Efficiency Chapter 7

A Mixed Rigid/Elastic Formulation for an Efficient Analysis of Electromechanical Systems

Authors: D. Ramaswamy, N.R. Aluru and J.K. White

Affilation: Massachusetts Institute of Technology, United States

Pages: 304 - 307

Keywords: MEMS, rigid, electromechanical, coupled, simulation

In this paper we describe both how to extract rigid bodies given an input file of elements, and how to efficiently construct and solve the rigid-elastic system of equations. Results are given to demonstrate that on a typical comb drive problem, our efficiently implemented mixed rigid-elastic simulator is more than 300 times faster than a purely elastic simulator. TVe also demonstrate that the mixed-regime simulator can be used as part of a coupled-domain simulator to perform 3-D electromechanical analysis of an entire comb drive in under ten minutes.

ISBN: 0-96661-35-0-3
Pages: 678