Authors: D. Ramaswamy, N.R. Aluru and J.K. White
Affilation: Massachusetts Institute of Technology, United States
Pages: 304 - 307
Keywords: MEMS, rigid, electromechanical, coupled, simulation
In this paper we describe both how to extract rigid bodies given an input file of elements, and how to efficiently construct and solve the rigid-elastic system of equations. Results are given to demonstrate that on a typical comb drive problem, our efficiently implemented mixed rigid-elastic simulator is more than 300 times faster than a purely elastic simulator. TVe also demonstrate that the mixed-regime simulator can be used as part of a coupled-domain simulator to perform 3-D electromechanical analysis of an entire comb drive in under ten minutes.