Verjus F., Bourouina T., Belhaire E., Mauduit N., Bosseboeuf A.
IEF-CNRS, FR
Keywords: buckling, FEM analysis, HDLA, multi-level simulation, resonator
This paper deals with the modelin and simulation of electrical stiffness control of a micro-bridge. Stiffness variations are obtained by compressive stresses that result from Joule heating. The micro-bridge is slaved to resonance in order to control its stiffness through its resonance frequency. This is carried-out in a PLL-based circuit in which the mechanical resonator acts as a VCO. Multi-level simulations have been achieved. A first-order analytical model of the micro-bridge has been set on the basis of approximations. Then, FEM simulations have been performed and used to build a refined model. The microbridge models have been implemented in HDLA language for the ELDO simulator. Finally, a system-level simulation has been used to analyze the behavior of the whole system, which includes the micro-bridge resonator linked with other electrical components.
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems
Published: April 6, 1998
Pages: 251 - 256
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-96661-35-0-3