MSM 98
MSM 98
Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems

Equivalent Circuits, Behavioral and Multilevel Simulation Chapter 6

Accurate Lumped-Parameter modeling for Dynamic Simulation of Electrostatic MEMS Actuators

Authors: S. Pal Chaudhury, D. Winick and P. Franzon

Affilation: North Carolina State University, United States

Pages: 278 - 282

Keywords: Hspice, Memcad, static parameter extraction, dynamic electrical equivalent

This paper introduces a novel approach of accurately modeling electrostatically actuated MEMS structures, using a lumped parameter electrical analogy based on voltage controlled in Spice. This analysis takes into account the changes in capacitive force and squeeze film damping because of movement of the structures, by modeling them by voltage controlled devices in Spice. The value of the spring constant and the capacitance, as a function of airgap between parallel plates is derived from commercially available CAD tools by static analysis of the MEMS structures. The speed of actuation and movement of the electrostatic MEMS devices, on applying a pulse voltage is simulated using HSpice. This paper provides a way of cosimulating digital, analog and sensor/actuator parts put together, on a single System on a chip.

ISBN: 0-96661-35-0-3
Pages: 678

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