Authors: Z. Li, G. Wu and Y.Y. Wang
Affilation: Peking University, China
Pages: 263 - 266
Keywords: HSPICE, behavioral modeling, capacitive force balanced accelerometer
Analyzing mechanism of accelerometer, electrical analogue of capacitive force-balanced accelerometer used in HSPICE simulator has been developed. Comparing to the former equivalent circuit, we use acceleration instead of displacement as input variable. Thus we can easily simulate the accelerometer response, and analyze effects of feedback force without twice integration as in conventional model. Using the analogue, response of the sensor to input acceleration at different frequencies was simulated.