Electrical Analogue of Capacitive Force-Balanced Accelerometer Used in HSPICE Simulator

Li Z., Wu G., Wang Y.Y.
Peking University, CN

Keywords: behavioral modeling, capacitive force balanced accelerometer, HSPICE

Analyzing mechanism of accelerometer, electrical analogue of capacitive force-balanced accelerometer used in HSPICE simulator has been developed. Comparing to the former equivalent circuit, we use acceleration instead of displacement as input variable. Thus we can easily simulate the accelerometer response, and analyze effects of feedback force without twice integration as in conventional model. Using the analogue, response of the sensor to input acceleration at different frequencies was simulated.

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Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems
Published: April 6, 1998
Pages: 263 - 266
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-96661-35-0-3