MSM 98
MSM 98
Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems

Characterization, Parameter Extraction, Calibration Chapter 5

Rational RSM Models for Device Characteristics as Functions of Process Parameters

Authors: Y. Granik and V. Moroz

Affilation: PDF Solutions, Inc., United States

Pages: 205 - 208

Keywords: TCAD, RSM, device, process, optimization

Conventional polynomial Response Surface Methodology (RSM) fails to provide oscillation-free analytical models for some device data with singularity like subthreshold slope vs threshold adjustment dose, poly gate length vs stepper defocus, etc. New type of RSM model is proposed in form of rational polynomials which are generalization of the conventional polynomials. This approach delivers oscillation-free RSM surfaces and intuitive interpretation of the data.

ISBN: 0-96661-35-0-3
Pages: 678