MSM 98
MSM 98
Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems

Characterization, Parameter Extraction, Calibration Chapter 5

Microelectromechanical Systems (MEMS) Design and Design Automation Research Projects at Duke University

Authors: A. Dewey and R.B. Fair

Affilation: Duke University, United States

Pages: 174 - 179

Keywords: MEMS design, MEMS modeling, VHD AMS, microelectromechanical systems

This paper presents an overview of microelectromechanical systems (MEMS) research being conducted at Duke University. The Duke University MEMS research program encompasses initiatives in both application design and design automation. These two areas serve synergistic and complementary roles: application design prm vides relevant challenge problems for design automation and design automation, in turn, provides computerbased modeling and analysis for applicaron design. Together, MEMS design and design automation research at Duke University address a wide array of technology for a broad user set. MEMS application design research involves explosives detection, cardiovascciar ultrasound scanning, and micro drug infusion. MEMS design automation research involves visual component modeling, rapid performance analysis, and yield oprimization.

ISBN: 0-96661-35-0-3
Pages: 678