MSM 98
MSM 98
Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems

Thermo-Mechanical Modeling Chapter 4

Extraction of Dynamic HDL-A Models of Thermally Based Microsystems from Physical Simulations

Authors: S. Marco, M. Carmona and J. Samitier

Affilation: Universitat de Barcelona, Spain

Pages: 157 - 162

Keywords: HDL, themal models, model order reduction

While analyzing the behaviour of complex systems it is not practical to carry out the simulation of the complete model a the physical level In order to move from simulations at tne physical level towards system modeling with more abstract representations. it is sometimes necessary to use lumped representations of a initially continuous system. Some of these lumped elements will be represented by a black-box model defined by a certain transfer function. This work addresses the problem of the identification of a continuous syster, namely a thermo-pneumatic microacruator. from irs ransient behavior as obtained from finite element modeling The influence of the integration algorithms is studied and a solunon is proposed to avoid its influence in the extracted transfer function. The final representation of the system is used in the simulation of a micropump by using an electronic simulator.

ISBN: 0-96661-35-0-3
Pages: 678