Authors: X.J.R. Avula
Affilation: University of Missouri-Rolla, United States
Pages: 133 - 138
Keywords: reliability, MEMS
The interdisciplinary field of micro-electro-mechanical systems (MEMS) has emerged as a dominant field with potential for the development of commercially viable products such as sensors and actuators, automotive and aerospace electronics, computer peripherals, communication devices, biomedical electronics and residential controls, etc. This paper addresses some of the reliability issues associated with fabrication and performance of these products. Production and maintenance of high quality MEMS products are important for capturing a significant share of the global market which is projected to reach $15 billions by the year 2000.