MSM 98
MSM 98
Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems

Modeling Chapter 3

Modeling of Strain in Boron-Doped Silicon Cantilevers

Authors: H.A. Rueda and M.E. Law

Affilation: University of Florida, United States

Pages: 94 - 99

Keywords: finite element method, boron, strain, cantilevers, residual stress

A finite element method is developed to compute the mechanical strain resulting from boron doping in silicon. This technique is then applied to the bending of borondoped silicon cantilevers. The silicon cantilever is modeled as an isotropic eiastic material. A lattice mismatch paramerer due to the substitutional boron is used as the strain source. Quaiitative agreement is resulted with experiments in the iiterature for varying thickness cantilevers.

ISBN: 0-96661-35-0-3
Pages: 678

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