Authors: C. Wächter, P. Schreiber, W. Karthe, J-P Elbers, C. Glingener, E. Voges, D. Krabe, R. Dümcke, H. Reichl, G. Hagner, S. Schröter, H. Bartelt, E.A. Stock, G. Bauer, W. Schäfer, H. Sickinger and J. Schwider
Affilation: Fraunhofer-Institut fur Angewandte Optikund Feinmechanik, Germany
Pages: 631 - 636
Keywords: optical, MEMS, MOEMS, design, modeling, system integration
Optical microsystems usually are of a hybrid nature. They consist of optical components. i.e.micro-optical and or integrated-optical ones, and additionally they include at least mechanical and packaging components. Therefore, a complete design process has to account for all relevant aspects - optical and thermomechanical simulation, packaging strategy, fabrication and test. This complexity requires a general design strategy. The approach presented is based on the coupling of the specification and the design. In a specification- environment the selection of appropriate solutions for given applications is enabled. It includes selection strategies for componebts, ist fabrication, packaging and test methods. The designenvironrnent is a simulation and modelling framework with software tools covering the whole design and optirnisation process, including the data-exchange with the specification environment. Test examples for our design strategy are different realisations of fibre optical switches.
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