Authors: E. Furlani
Affilation: Eastman Kodak Co., United States
Pages: 614 - 618
Keywords: grating light valve, microbeam deflection, MEMS simulation, electrostatic analysis, finite element analysis.
The Grating Light Valve (GLV) is a microelectromechanical reflection phase grating that operates on the electrostatic deflection of microbeams. In this paper we discuss a method for simulating GLVs. This method entails the solution of a nonlinear fourth-order beam equation with a forcing function, which is based on a parallelplate capacitor model. We examine the accuracy of the force model using 2D finite element analysis (FEA). We show that this model renders force values that are within 90% of the FEA values. We also compute microbeam deflection profiles and switching voltages, and demonstrate that rigorous GLV simulations can be performed in a few minutes on a personal computer.