MSM 98
MSM 98
Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems

Applications: Optics, Electromagnetics Chapter 13

Simulation of Grating Light Valves

Authors: E. Furlani

Affilation: Eastman Kodak Co., United States

Pages: 614 - 618

Keywords: grating light valve, microbeam deflection, MEMS simulation, electrostatic analysis, finite element analysis.

The Grating Light Valve (GLV) is a microelectromechanical reflection phase grating that operates on the electrostatic deflection of microbeams. In this paper we discuss a method for simulating GLVs. This method entails the solution of a nonlinear fourth-order beam equation with a forcing function, which is based on a parallelplate capacitor model. We examine the accuracy of the force model using 2D finite element analysis (FEA). We show that this model renders force values that are within 90% of the FEA values. We also compute microbeam deflection profiles and switching voltages, and demonstrate that rigorous GLV simulations can be performed in a few minutes on a personal computer.

ISBN: 0-96661-35-0-3
Pages: 678