Authors: F. Yang and I. Kao
Affilation: SUNY-Stony Brook, United States
Pages: 534 - 539
Keywords: fluid-structure interaction, plate theory, Bernoulli equation, MEMS valve
Based on simple plate theory and the Bernoulli equation, the effect of fluid flow on the deformation of fluid driven MEMS diaphragm microvalve is investigated analytically and numerically. The static instability of such a microsystem is demonstrated with both analytical and numerical solutions. Theoretical formula is presented for prediction of the limit flow velocity at which the pressure difference across the diaphragm is positive over the whole MEMS diaphragm. In addition, static stiction phenomena is analyzed and a closed form sc ution of the relation between the contact zone and the external pressure is obtained. The results provide important information of parameters in the design of MEM diaphragm valve and can be used as a basis in the mechanical design of such valves.