Authors: R.E. Oosterbroek, S. Schlautmann, J.W. Berenschot, T.S.J. Lammerink, A. van den Berg and M.C. Elwenspoek
Affilation: University of TWente, LN
Pages: 528 - 533
Keywords: valves, CFD, FEM, domain coupling, microTAS
This paper reports the modeling of the stationary flow-structure interaction of different types of micro check valves. Mathematical indirect, domain coupled and decoupled, finite element models as well as analytical approximations are made. The obtained simulation results are validated by performed measurements on fabricated micro valves. Simple analytical formulas are derived. These can be used for micro fluid handing component design purposes as well as for input for numerical lumped element system simulation programs.