MSM 98
MSM 98
Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems

Applications: Microfluidics Chapter 11

Modeling and Validation of Flow-Structure Interactions in Passive Micro Valves

Authors: R.E. Oosterbroek, S. Schlautmann, J.W. Berenschot, T.S.J. Lammerink, A. van den Berg and M.C. Elwenspoek

Affilation: University of TWente, LN

Pages: 528 - 533

Keywords: valves, CFD, FEM, domain coupling, microTAS

This paper reports the modeling of the stationary flow-structure interaction of different types of micro check valves. Mathematical indirect, domain coupled and decoupled, finite element models as well as analytical approximations are made. The obtained simulation results are validated by performed measurements on fabricated micro valves. Simple analytical formulas are derived. These can be used for micro fluid handing component design purposes as well as for input for numerical lumped element system simulation programs.

ISBN: 0-96661-35-0-3
Pages: 678