MSM 98
MSM 98
Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems

Applications: Microfluidics Chapter 11

Modeling 3-D Fluid Flow for a MEMS Laminar Proportional Amplifier

Authors: M.M. Athavale, H.Y. Li, A.J. Przekwas, B.H. Piekarski, R.J. Zeto and S.M. Tenney

Affilation: CFD Research Corporation, United States

Pages: 522 - 527

Keywords: Flow simulation, fluid dynamics, fluidic arnplifier, MEMS processing

Fluid flow in a microfluidic laminar proportional amplifier (LPA) was simulated using an advanced 3-D flow solver, CFD-ACE+. Pressure gains for single-stage and two-stage blocked output LPAs were calculated under a variety of flow conditions and compared with experimental data. Modeled gains compared well with results from experiments and established design correlations. The accuracy of the results on the complex amplifier flows demonstrates the flow solver's capability to yield reliable predictions and its potential usefulness in the design and performance predictions of microfluidic devices.

ISBN: 0-96661-35-0-3
Pages: 678