Authors: P. Voigt, G. Schrag, E-R König and G. Wachutka
Affilation: Technical University of Münich, Germany
Pages: 517 - 521
Keywords: Microsystem compact models, Kirchhoffian Networks, Coupled Fluid-Structure FEM, Micropump
A hierarchical approach to microsystem modeling is outlined. On the device level, the operating behavior is analyzed on the basis of continuous field models To deal with the coupling effects typical of microsystems, various coupling schemes between single-effect simulators can be used. Equipped with the direct insight into the device operation, compact models are developed. Starting from a thermodynamic system description, the reduction to only a small number of degrees of freedom leads to compact models, which still correctly reproduce the relevant conservation laws and, therefore, can be connected to form a Generalized Kirchhoffian Network. This is equivalent to a system of ordinary algebrodifferential equations for the node variables, which is solved using one of the standard analog netvvork simulators available. As an illustrating example, the analysis of an electrostatically driven micropump is presented. Starting from a detailed analysis of the constituent parts of the pump, a system macromodel is set up and utilized for analyzing a typical operation regime.
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