MSM 98
MSM 98
Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems

Applications: Microfluidics Chapter 11

Squeeze Film Damping Effect on the Dynamic Response of a MEMS Torsion Mirror

Authors: F. Pan, J. Kubby, E. Peeters, A.T. Tran and S. Mukherjee

Affilation: XEROX, Xerox Wilson Research Center, United States

Pages: 474 - 479

Keywords: squeeze film damping toraue, torsion mirror, Reynold's equation, series solutions.

Analytical formulae for the squeeze film darnping torque on a MEMS torsion mirror are derived based on series solutions to the linearized Reynold's equation. The derivation is carried out under the assumption that the angular displacement of the mirror is small and is a harmonic function of time. This analytical squeeze film damping model is verified by numerically solving the nonlinear isothermal Reynold's equation [1], and by conducting experimental measurements on a prototype device. Finally it is shown that although the analytical damping model is derived under the assumption of harmonic time response of the torsion mirror, it is still valid for the case of non-harmonic response, as long as the squeeze number is fairly small.

ISBN: 0-96661-35-0-3
Pages: 678