MSM 98
MSM 98
Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems

Applications: Chemical Sensors Chapter 10

Thermal Simulation Tools for Microsystem Elements

Authors: V. Székely, M. Rencz, A. Páhi, A. Poppe and Sz. Hajder

Affilation: Technical University of Budapest, Hungary

Pages: 463 - 468

Keywords: thermal simulation tools, MEMS

Two different field solver tools have been developed in order ro facilitate fast thermal and electro-static simulation of microsystem elements. The pSTHERMANAL program is capable for the fast steadystate and dynamic simulation of suspended multilayered microsystem structures. The 2D-SUNRED program is the first version of a generalfield solver based on an original method, the successive node reduction. SUNRED offers a very fast and accurate substitute of FEM programs for the solution of the Poisson equation.

ISBN: 0-96661-35-0-3
Pages: 678