Nanotech 2002 Vol. 1
Nanotech 2002 Vol. 1
Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems

Process Modeling Chapter 8

Rule Based Validation of Processing Sequences

Authors: U. Hansen, C. Germer, S. Büttgenbach and H-J Franke

Affilation: TU Braunschweig, Germany

Pages: 438 - 441

Keywords: process rules, process compatibility, MST CAD, process configuration

In conventional mechanical engineering the development of a product is influenced only little by the specific requirements of the fabrication processes. When looking at the domain of micro mechanical devices this circumstance is no longer given. The design choices made while constructing a micro system are highly dependent on the manufacturing techniques available. Furthermore the chosen technologies lead to a restriction of the usable materials. Consequently the quantity of possible combinations of the geometries, materials and processing applicable is – due to this multitude of constraints – significantly reduced. While simultaneously defining the layout and the processing sequence the designer is inevitably confronted with the need for many iterative redesigns. Hence an automated tool, which encloses a compatibility evaluation of the defined sequence, is desirable. This paper introduces a software prototype for tackling this obstacle by employing an inference engine to verify user-defined process sequences.

ISBN: 0-9708275-7-1
Pages: 764