Triangle Transducer for Micro Electro Mechanical Systems (MEMS) Simulation in ANSYS Finite Element Program

Gyimesi M., Ostergaard D., Avdeev I.
ANSYS, Inc., US

Keywords: finite elements, MEMS, reduced-order modeling, transducer

The paper introduces a new methodology with a distributed triangle transducer for the strongly coupled simulation of micro electro mechanical systems (MEMS) in ANSYS Finite Element (FE) program.

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Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems
Published: April 22, 2002
Pages: 380 - 383
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9708275-7-1