Nanotech 2002 Vol. 1
Nanotech 2002 Vol. 1
Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems

Numerics Chapter 7

Triangle Transducer for Micro Electro Mechanical Systems (MEMS) Simulation in ANSYS Finite Element Program

Authors: M. Gyimesi, D. Ostergaard and I. Avdeev

Affilation: ANSYS, Inc., United States

Pages: 380 - 383

Keywords: MEMS, finite elements, transducer, reduced order modeling

The paper introduces a new methodology with a distributed triangle transducer for the strongly coupled simulation of micro electro mechanical systems (MEMS) in ANSYS Finite Element (FE) program.

ISBN: 0-9708275-7-1
Pages: 764

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