Authors: T.P. Kurzweg, S.P. Levitan, J.A. Martinez, M. Kahrs and D.M. Chiarulli
Affilation: University of Pittsburgh, United States
Pages: 352 - 355
Keywords: optical MEMS, MOEMS, angular spectrum, optical propagation, CAD
As designers become more aggressive in introducing optical components into micro-systems, additional capabilities are required for modeling and simulation tools. Common optical modeling techniques are not applicable for most optical micro-systems, and techniques that are valid are computationally slow. In this paper, we introduce an angular spectrum propagation modeling technique that greatly reduces computation time while maintaining the accuracy of the full scalar formulation. We present simulations of light propagating through optical MEM components and show the advantages of this optical propagation method and the integration of the technique into a system-level multidomain CAD tool.
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