Nanotech 2002 Vol. 1
Nanotech 2002 Vol. 1
Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems

Magnetic Device Modeling and Design Chapter 6

Development of a MEMS Vertical Planar Coil Inductor

Authors: J. Chen, J. Zou, C. Liu and S-M Kang

Affilation: Agere Systems, United States

Pages: 344 - 347

Keywords: MEMS, planar coil inductor, quality factor, PDMA, resonance frequency

This paper presents the results of the development of a vertical planar coil inductor. The planar coil inductor is first fabricated on silicon substrate and then assembled to the vertical position by using a novel 3-Dimensional bath-scale self-assembly process (Plastic Deformation Magnetic Assembly (PDMA)). Inductors of different dimensions are fabricated and tested. The S-parameters of the inductors before and after PDMA are measured and compared, demonstrating superior performance due to reduced substrate effects and also increased substrate space savings for the vertical planar coil inductors.

ISBN: 0-9708275-7-1
Pages: 764

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