Nanotech 2002 Vol. 1
Nanotech 2002 Vol. 1
Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems

MEMS Applications and Characterization Chapter 5

RF Measurement Techniques for Micro-Cantilever Characterization and Application

Authors: C-H Wang and R.J. Weber

Affilation: Iowa State University, United States

Pages: 310 - 313

Keywords: MEMS, pull-in voltage, microstrip line, MUMPs

The reflection coefficient (S11) of a one-port device is most sensitive to its input impedance if a matched condition is obtained. This implies two methods to measure the deflection-induced impedance change for a 1-port device such as micro-cantilever in our case: 1) selecting an operating frequency at which the input impedance is closest to the characteristic impedance of the measurement system; 2) inserting a matching network to obtain a matched condition at a preferred operating frequency. Using the first method, the capacitance change can be measured at various DC bias voltages. Using the second method, the input impedance of a DUT is matched to 50 ohms at a desired frequency. Because of this matched condition, the reflection coefficient is very sensitive to DC bias on a DUT. A 20 dB change of |S11| in 2 Volts range without amplification was obtained. Both methods are quite simple and can be very useful for characterizing the capacitance change for a capacitive sensor and/or sensor application.

ISBN: 0-9708275-7-1
Pages: 764