Nanotech 2002 Vol. 1
Nanotech 2002 Vol. 1
Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems

MEMS Applications and Characterization Chapter 5

Analytical and FEM Simulation Pull-in Study on Deformable Electrostatic Micro Actuators

Authors: J. Cheng, J. Zhe, X. Wu, K.R. Farmer, V. Modi and L. Frechette

Affilation: Columbia University, United States

Pages: 298 - 301

Keywords: micro-actuator, pull in, electrostatic, FEM, analytical, deformable

In this paper, we employed an easy general theory [1, 2] over FEM simulation to carry out the pull in analysis of cantilever beam, fixed-fixed beam and circular membrane actuators and compare the results with the FEM simulation. This analytical method utilizes capacitance-based generalized equations and provides an easy and time saving platform over complicated coupled FEM simulations for pull in analysis of complex system. It is found that deformation curves of these three electrode configurations are independent of geometry and voltage. It is shows that the three deformable actuators could reach travel ranges of 47.2%, 42% and 45.6% respectively. Fringe effect is also considered in this analytical method. The fringe effect will increase the travel range from 40% to 42% for fixed -fixed beam, from 45.4% to 47.2% for cantilever beam, but decreases the travel range from 45.6% to 41.6% for clamped circular membrane.

ISBN: 0-9708275-7-1
Pages: 764

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