Nanotech 2002 Vol. 1
Nanotech 2002 Vol. 1
Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems

MEMS Applications and Characterization Chapter 5

Structural Analysis of a Magnetically Actuated Silicon Nitride Micro-Shutter for Space Applications

Authors: J.P. Loughlin, R.K. Fettig, S.H. Moseley, A.S. Kutyrev and D.B. Mott

Affilation: NASA/Goddard Space Flight Center, United States

Pages: 291 - 293

Keywords: MEMS, micro-shutter, silicon nitride, electrostatic, electromagnetic

Finite element models have been created to simulate the electrostatic and electromagnetic actuation of a 0.5mm silicon nitride micro-shutter for use in a space-based Multi-object Spectrometer (MOS). The micro-shutter uses a torsion hinge to go from the closed, 0 degree, position, to the open, 90 degree position. Stresses in the torsion bar are determined with a large deformation nonlinear finite element model. The simulation results are compared to experimental measurements of fabricated micro-shutter devices.

ISBN: 0-9708275-7-1
Pages: 764

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