Nanotech 2002 Vol. 1
Nanotech 2002 Vol. 1
Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems

MEMS Applications and Characterization Chapter 5

Simulation Based Design of O2 MEMS Sensor

Authors: Z. Andjelic, P. Krippner and A. Vogel

Affilation: ABB Corporate Research Center, Germany

Pages: 279 - 282

Keywords: BEM, magnetostatic, MBIT, integral methods, sensors

The paper presents the methodology for the Simulation Based Design (SBD) of MEMS sensors influenced by mechanical and electromagnetic phenomena. The complexity of the problems mostly asks for both the efficient 3D numerical technologies and the sophisticated tools to capture the physical phenomena appearing in the operational conditions. In this paper we present the application of the Multipole Based Integral Technology (MBIT) for the simulation of MEMS-based paramagnetic oxygen sensors. A special procedure for the calculation of the forces caused by the molecular pressure is also presented.

ISBN: 0-9708275-7-1
Pages: 764