Nanotech 2002 Vol. 1
Nanotech 2002 Vol. 1
Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems

MEMS Applications and Characterization Chapter 5

Modeling and Simulation of Silicon Microsystem of Chemical Signals

Authors: M. Daniel, M. Szermer, K. Slusarczyk and A. Napieralski

Affilation: Technical University of Lodz, Poland

Pages: 262 - 265


The purpose of this paper is to introduce the new approach to the integrated microsystem oriented for water monitoring. Nowadays it becomes extremely important to analyze and estimate the chemical composition of water. Presented microsystem is an important part of the complex monitoring system that in future is going to be set up in Europe. It bases on the two major parts. First one is the microsensor part which the sensor of chemical signal is included in. Second part of the microsystem is responsible for acquiring and processing of the signal from the sensor. It consists of the preprocessing part and analogue/digital conversion part, which bases mainly on the analogue/digital sigma – delta converter. The whole design of microsystem was simulated in ELDO (Mentor Graphics) environment in which the behavioral model of ISFET as well as model of processing part was implemented. Afterwards verification of this part was performed in ELDO simulator.

ISBN: 0-9708275-7-1
Pages: 764