Nanotech 2002 Vol. 1
Nanotech 2002 Vol. 1
Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems

MEMS Applications and Characterization Chapter 5

Simulation and Measurement of Dielectric Charging in Electrostatically Actuated Capacitive Microwave Switches

Authors: J.R. Reid

Affilation: US Air Force Research Laboratory, AFRL/SNHA, United States

Pages: 250 - 253

Keywords: microwave switches, dielectric charging, reliability

Simulations of the effects of dielectric charging on the operation of electrostatically actuated capacitive microwave switches have been performed. The simulations are unique in that they incorporate fixed charges into the calculation of the beam deflection. These simulations show that fixed charges in the dielectric layer cause a shift in the capacitance-voltage curve of the switch. The shift in the curve is proportional to the magnitude and depth of the charge, while the direction of the shift is determined by the polarity of the charge. Further, it is shown that sufficient charge can result in a failure of the switch to release from the dielectric layer. The simulation is confirmed by comparison with measured data.

ISBN: 0-9708275-7-1
Pages: 764