Nanotech 2002 Vol. 1
Nanotech 2002 Vol. 1
Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems

MEMS Applications and Characterization Chapter 5

Design of the Two-Movable Plates Type MEMS Voltage Tunable Capacitor

Authors: Y. Kim, S-G Lee and S. Park

Affilation: Kyungpook National University, Korea

Pages: 246 - 249

Keywords: design, RF-MEMS, tunable capacitor, two-movable parallel plate, electrostatic force

In this paper, we have proposed and designed the new structure of a RF-MEMS voltage tunable capacitor, which have two-movable parallel plates using electrostatic method and can be fabricated by the MEMS technology. Capacitance of the designed voltage tunable capacitor has from 1.0pF to 1.48pF as the applied bias voltage from 0.5V to 2.52V. The effective area and the distance of the capacitor plates are 335_335µm2 and 1µm for 1pF, respectively. And the results of the simulation by the HFSS simulation program for designed tunable capacitor will be shown by the graph. The frequency range of this simulation is from 1GHz to 7GHz. The result is shown that the magnitude of the resistance is very smaller than that of the capacitance in the designed tunable capacitor.

ISBN: 0-9708275-7-1
Pages: 764