Nanotech 2002 Vol. 1
Nanotech 2002 Vol. 1
Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems

MEMS Applications and Characterization Chapter 5

Snap-Through Bilayer Microbeam

Authors: A. Cabal and D.S. Ross

Affilation: Eastman Kodak Company, United States

Pages: 230 - 233

Keywords: buckling, snap-through, bilayer microbeam

In this paper, we describe our theoretical investigations of snap-through bilayer microbeams. We use a mathematical model that we devised to investigate the nonmonotone dependence of the vibrational frequency of such beams on temperature. The reader can find information about the fabrication and experiments we used to validate this model in [6]. We describe the fundamental physical difference between buckling and snap-through of a microbeam. We investigate parameters that are critical in the design of snap-through bilayer microbeam for practical purposes. We conclude that the thermal snap-through bilayer microbeam is a better candidate in many applications than a thermally induced buckling microbeam of similar design.

ISBN: 0-9708275-7-1
Pages: 764

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