Nanotech 2002 Vol. 1
Nanotech 2002 Vol. 1
Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems

MEMS Applications and Characterization Chapter 5

Simulation and Realization of Free Space Optical Switch Architecture Based on MEMS Vertical Mirrors

Authors: W.J. Wang and R.M. Lin

Affilation: Nanyang Technological, Singapore

Pages: 226 - 229

Keywords: MEMS, free-space, optical switch architecture, Gaussian beam optics, finite element method

In this paper, we report on a novel optical cross-connect switch architecture based on MEMS vertical mirrors. The switch consists of a pair of MEMS mirror arrays to redirect optical beams from an input fiber array to an output array. Each mirror is actuated by two electrostatic comb drive actuators, and can be rotated bi-directionally and perpendicularly to the chip surface. Finite element method and Gaussian beam propagation model are used to simulate and validate the proposed optical cross-connect switch architecture. The switch concept has been demonstrated using 1550 nm single-mode optical fibers at the switch ports. Results have shown that the switch is much less constrained by the scaling distance of light propagation as the port count grows compared to previously reported switch architectures.

ISBN: 0-9708275-7-1
Pages: 764

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