Nanotech 2002 Vol. 1
Nanotech 2002 Vol. 1
Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems

MEMS Applications and Characterization Chapter 5

Thermal Stability Evaluation of MEMS Microactuator for Hard Disk Drive

Authors: M. Jianqiang, C. Shixin, L. Yi, L. Boon Buan

Affilation: Data Storage Institute, Singapore

Pages: 222 - 225

Keywords: thermal, stability, MEMS, microactuator, hard disk drives

Advances in hard disk drives have created a need for MEMS actuator to achieve high bandwidth of tracking servo and fine positioning of magnetic head. Thermal stability under operational conditions is one of the critical requirements for the application of MEMS actuators in hard disk drives. In this paper, thermal stability of a comb-drive piggy back MEMS microactuator integrated with Head Gimble Assembly (HGA) is modeled and evaluated. The temperature stability of the microactuator in dimension is analyzed. The thermal deformation and thermal stress of the microactuator are simulated by Finite Element Model. The variance in operational characteristics of the MEMS actuator caused by the thermal deformation is analyzed by electrical-mechanical couple analysis. Different materials and fabrication processes for the actuator microstructures are discussed. A scheme for improvement of the thermal stability of the MEMS microactuator for hard disk drives (HDD) is proposed.

ISBN: 0-9708275-7-1
Pages: 764

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