Brenner M.P., Lang J., Li J., Qiu J., Slocum A.
Harvard University, US
Keywords: MEMS, optimization, switch
We describe a novel methodology for predicting optimal designs for microelectromechanical devices. The methods are applied towards the optimization of component shapes of a bistable MEMS switch. Small modifications in component shapes lead to a substantial improvement in the device operation.
Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems
Published: April 22, 2002
Pages: 214 - 217
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9708275-7-1