Authors: M.P. Brenner, J. Lang, J. Li, J. Qiu and A. Slocum
Affilation: Harvard University, United States
Pages: 214 - 217
Keywords: switch, MEMS, optimization
We describe a novel methodology for predicting optimal designs for microelectromechanical devices. The methods are applied towards the optimization of component shapes of a bistable MEMS switch. Small modifications in component shapes lead to a substantial improvement in the device operation.