Nanotech 2002 Vol. 1
Nanotech 2002 Vol. 1
Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems

Optimization, Co-Simulation Chapter 4

An Efficient Numerical Algorithm for Extracting Pull-In Hyper-Surfaces of Electrostatic Actuators with Multiple Uncoupled Electrodes

Authors: D. Elata, O. Bochobza-Degani and Y. Nemirovsky

Affilation: Technion – Israel Institute of Technology, Israel

Pages: 206 - 209

Keywords: pull-in hypersurface, multiple uncoupled voltage sources, DIPIE, electrostatic actuation

In this work the stability of electrostatic actuators with multiple uncoupled voltage sources applied to separate isolated excitation electrodes is analyzed. These electrodes are used to drive a continuous deformable element. A novel computational strategy and an efficient numerical scheme for simulating such problems are presented. The theory of the stability of electrostatic actuation and specifically the notion of the Pull-In state are generalized to such systems. In this respect, for an actuator with K-uncoupled electrodes and N-degrees of freedom, the Pull-In is shown to be a K-1 dimensional hyper-surface in a N+K dimensional state-space of the actuator. The novel strategy enables the extraction of the Pull-In hyper-surface by scanning the voltage space along voltage hyper-rays. Along these rays a DIPIE scheme is used to rapidly extract the Pull-In parameters, resulting in an efficient multi-DIPIE scheme. To illustrate the strategy a clamped-clamped beam actuator with multiple electrodes is analyzed.

ISBN: 0-9708275-7-1
Pages: 764