Authors: J.F. Alfaro and G.K. Fedder
Affilation: Carnegie Mellon University, United States
Pages: 202 - 205
Keywords: CMOS, data storage, electrostatic actuator, MEMS, optimization
This paper describes the development of a micro media actuator (MMA) for probe-based mass data storage. The process is based on dry etching and incorporates a thinned silicon media sled to increase the frequency response of the system. The suspended micro-mechanical media sled moves in x-y (±50 mm) using electrostatic actuation. The system design specification requires actuation of an 8x8 mm2 magnetic media over an array of 80x80 probe tips. The main advantage of our design is lower access time (1 ms – 0.1 ms), and an optimized design for specified maximum space allowed. The multiple competing design goals in the media actuator led to the development of an optimization-based media-actuator design tool, which was used to identify and characterize the parameters needed to scale the media. The tradeoff between access time and capacity is invariant of media size. The MMA is to be integrated with other MEMS components and CMOS electronics to achieve the data storage system .
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