Nanotech 2002 Vol. 1
Nanotech 2002 Vol. 1
Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems

System Level Modeling of MEMS Chapter 3

Large-Deflection Beam Model for Schematic-Based Behavioral Simulation in NODAS

Authors: Q. Jing, T. Mukherjee and G.K. Fedder

Affilation: Carnegie Mellon University, United States

Pages: 136 - 139

Keywords: beam, geometric nonlinearity, axial stress, large deflection

MEMS design in NODAS is based on a geometrically intuitive schematic representation of MEMS using a small set of atomic elements (anchors, beams, plates and electrostatic gaps), each of which is associated with a geometrically parameterized lumped behavioral model. A linear beam model is unsuitable for simulation of devices where the beam deflection is large or where axial stress exists in the beam. Due to the complexity of the nonlinear beam mechanics, exact analytical solutions are generally unavailable. A nonlinear beam model for behavioral simulation is presented, which captures the geometric nonlinearity caused by large axial stress and large deflection. Very good agreement of the NODAS simulation results of example problems with available analytical solutions and with FEA simulation results verifies the model accuracy.

ISBN: 0-9708275-7-1
Pages: 764