Nanotech 2002 Vol. 1
Nanotech 2002 Vol. 1
Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems

System Level Modeling of MEMS Chapter 3

Integrated Modeling of Optical MEMS Subsystems

Authors: R. Stoll, T. Plowman, D. Winick and A. Morris

Affilation: Coventor, United States

Pages: 132 - 135

Keywords: microelectromechanical systems (MEMS), MOEMS, behavioral model, microsystems, optical cross-connect

This paper presents top-down holistic design and verification of a MEMS-based 3-D optical switching subsystem utilizing an integrated CAD environment. The subsystem design takes place in a nodal simulation environment that includes models for fibers, lenses, mirrors, control elements, general electronics, and detailed mechanics. In this paper, we explore the design of an optical cross-connect using an optical circuit to evaluate the optical performance of the cross-connect and electromechanical models to assess the tuning limitation imposed by the MEMS mirrors. From the performance specifications, we are able to deduce an optimum cross-connect array size for any given mirror size.

ISBN: 0-9708275-7-1
Pages: 764

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