Nanotech 2002 Vol. 1
Nanotech 2002 Vol. 1
Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems

System Level Modeling of MEMS Chapter 3

Modeling, Simulation and Design of Piezoelectric Micro-Hydraulic Transducer Devices

Authors: O. Yaglioglu, Y.H. Su, D.C. Roberts, J. Carretero and N.W. Hagood

Affilation: Massachusetts Institute of Technology,, United States

Pages: 120 - 123

Keywords: microhydraulic, power generation, piezoelectric

This paper reports on modeling, simulation and design considerations for piezoelectric Micro-Hydraulic Transducer (MHT) systems, focusing on power generation applications. Since these devices are complex fluid and structural systems, comprehensive simulation tools are needed for effective design. A system level simulation tool has been developed using SimulinkTM, by integrating models for different energy domains, namely fluids, structures, piezoelectrics and circuitry. The simulation allows for the monitoring of important parameters such as chamber pressure, flowrate, and various structural component deflections and stresses. Using the simulation, the operation of the system is analyzed and important design considerations are evaluated. Results indicate that system efficiency is highly dependent on compliances within the device structure and the type of piezoelectric material used.

ISBN: 0-9708275-7-1
Pages: 764