Nanotech 2002 Vol. 1
Nanotech 2002 Vol. 1
Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems

System Level Modeling of MEMS Chapter 3

Time-Domain Reduced-Order Models of Lateral Viscous Damping Effects for 3-D Geometries

Authors: P-C Yen and Y-J Yang

Affilation: National Taiwan University, Taiwan

Pages: 190 - 193

Keywords: Stokes’ equation, lateral damping, model order reduction, macromodel, Stokes flow

A methodology of generating time-domain reduced-order models of viscous lateral damping effects for microsystems is presented. A three-dimensional finite-difference-method (FDM) Stokes flow solver was developed and verified. The system matrices generate by the solver were then reduced to low-order macromodels, which can be easily inserted into a system-level modeling package for transient and frequency analysis. The simulated results of the FDM Stokes solver and the reduced-order macromodels are verified with the analytical solution. The reduced-order models have been seen to be about two-order-of-magnitude as efficient as the FDM solver. Transient simulations also indicate that friction stress of 3D model results in more damping effects than those estimated by the 1-D analytical models.

ISBN: 0-9708275-7-1
Pages: 764