Nanotech 2002 Vol. 1
Nanotech 2002 Vol. 1
Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems

System Level Modeling of MEMS Chapter 3

Scaling Behavior of Pressure-Driven Micro-Hydraulic Systems

Authors: N.R. Tas, T.S.J. Lammerink, J.W. Berenschot, M.C. Elwenspoek and A. van den Berg

Affilation: University of Twente, LN

Pages: 174 - 177

Keywords: scaling, micro-fluidics, hydraulic oscillator

This paper presents a lumped network approach for the modelling and design of micro-hydraulic systems. A hydraulic oscillator has been built consisting of hydraulic resistors, capacitors and transistors (pressure controlled valves). The scaling of micro-hydraulic networks consisting of linear resistors, capacitors and inertances has been studied. An important result is that to make smaller networks faster, driving pressures should increase with reducing size.

ISBN: 0-9708275-7-1
Pages: 764