Authors: T. Tinttunen, T. Veijola, H. Nieminen, V. Ermolov and T. Ryhanen
Affilation: Helsinki University of Technology, Finland
Pages: 166 - 169
Keywords: MEMS, RF, capacitive switch, tunable capacitor, equivalent circuit
A simulation model for static analysis of a doubly supported capacitive MEMS RF switch has been constructed using electrical equivalencies. Energy-conserving large-displacement macro models for beam deflection, gap capacitance, electrostatic force, and mechanical contact are utilized. A one-dimensional finite-difference approach is utilized. The model is capable of reproducing the large-displacement beam deflection profile. The static model is verified by comparing APLAC© simulation results with measured CV characteristics. The results show that the model correctly reproduces the CV characteristics, including the performance at contact.