Nanotech 2002 Vol. 1
Nanotech 2002 Vol. 1
Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems

System Level Modeling of MEMS Chapter 3

Modeling, Simulation and Design of Piezoelectric Micro-Hydraulic Transducer Devices
O. Yaglioglu, Y.H. Su, D.C. Roberts, J. Carretero and N.W. Hagood
Massachusetts Institute of Technology,, US

Physically-Based Damping Model for Highly Perforated and Largely Deflected Torsional Actuators
R. Sattler, G. Schrag and G. Wachutka
Munich University of Technology, DE

Improving Trajectory Piecewise-Linear Approach to Nonlinear Model Order Reduction for Microm䁡chined Devices Using an Aggregated Projection Basis
M. Rewienski and J.K. White
Massachusetts Institute of Technology,, US

Integrated Modeling of Optical MEMS Subsystems
R. Stoll, T. Plowman, D. Winick and A. Morris
Coventor, US

Large-Deflection Beam Model for Schematic-Based Behavioral Simulation in NODAS
Q. Jing, T. Mukherjee and G.K. Fedder
Carnegie Mellon University, US

Integrated Hierarchical Design of Microelectrofluidic Systems using SystemC
T. Zhang, K. Chakrabarty and R.B. Fair
Cadence Design Systems, Inc., US

Behavioral Modeling of a Humidity Sensor Using an Analog Hardware Description Language
A. Tételin, H. Lévi, B. Mongellaz and C. Pellet
Laboratoire IXL, FR

Nonlinear Analytical Reduced-Order Models for MEMS
E.R. Westby and T.A. Fjeldly
Norwegian University of Science and Technology, NO

Noise Considerations for Closed Loop Digital Accelerometers
E. Gaura and M. Kraft
Coventry University, UK

Coupled-Energy-Domain Macromodeling of MEMS Devices
G. Casinovi
Georgia Institute of Technology, US

Micromechanical Pierce Oscillator for Resonant Sensing Applications
A.A. Seshia, W. Low, S.A. Bhave, R.T. Howe and S. Montague
University of California, US

Static Equivalent Circuit Model for a Capacitive MEMS RF Switch
T. Tinttunen, T. Veijola, H. Nieminen, V. Ermolov and T. Ryhanen
Helsinki University of Technology, FI

Simulation of a Micro Dispenser Using Lumped Models
P. Koltay, C. Moosmann, C. Litterst, W. Streule and R. Zengerle
University of Freiburg, DE

Scaling Behavior of Pressure-Driven Micro-Hydraulic Systems
N.R. Tas, T.S.J. Lammerink, J.W. Berenschot, M.C. Elwenspoek and A. van den Berg
University of Twente, LN

Macromodel Extraction of Gas Damping Effects for Perforated Surfaces with Arbitrarily-Shaped Geometries
Y-J Yang and C-J Yu
National Taiwan University, TW

Dispersion Modeling in Microfluidic Channels for System-level Optimization
B. Baidya, T. Mukherjee and J.F. Hoburg
Carnegie Mellon University, US

Simulation of Manufacturing Variations in a Z-axis CMOS-MEMS Gyroscope
S. Iyer and T. Mukherjee
Carnegie Mellon University, US

Time-Domain Reduced-Order Models of Lateral Viscous Damping Effects for 3-D Geometries
P-C Yen and Y-J Yang
National Taiwan University, TW

ISBN: 0-9708275-7-1
Pages: 764