Keywords: compact modeling, semiconductor, simulation, TCAD
This paper is an introduction to semiconductor process and device simulation and its role in compact modeling for circuit simulation. A brief history of TCAD is given. One use of TCAD is in the generation of compact models for circuit simulation. TCAD also has an emerging role in the development of the compact models themselves. Examples of TCAD being used for both these applications are presented.
Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems
Published: April 22, 2002
Pages: 719 - 721
Industry sector: Sensors, MEMS, Electronics
Topic: Compact Modeling
ISBN: 0-9708275-7-1