Nanotech 2002 Vol. 1
Nanotech 2002 Vol. 1
Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems

Semiconductor Device Modeling Chapter 11

Non-Parabolicity and Non-Maxwellian Effects on Gate Oxide Tunneling

Authors: A. Gehring, T. Grasser and S. Selberherr

Affilation: TU Vienna, Austria

Pages: 560 - 563

Keywords: tunneling, moment equations, BOLTZMANN equation, distribution function model

Simulation of gate oxide tunneling currents in subquartermicron devices requires correct modeling of the electron energy distribution function in the channel region. However, the common assumption of a heated Maxwellian distribution function leads to a dramatic overestimation of the high-energy tail of the distribution function near the drain region which leads to spurious gate currents for short-channel devices. Our approach is based on a recently presented transport model which accounts for six moments of the Boltzmann transport equation. Using this model, the shape of the distribution function can be reproduced more accurately and the gate current behavior of short-channel devices shows a more reasonable behavior.

ISBN: 0-9708275-7-1
Pages: 764