Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems

Process Modeling Chapter 9

A Framework for Mask-Layout Synthesis Implementing a Level Set Method Simulator

Authors: C-Y. Lee and E.K. Antonsson

Affilation: California Institute of Technology, United States

Pages: 438 - 441

Keywords: mask-layout synthesis, evolutionary algorithms, level sets

Recently, evolutionary methods have been developed to automate MEMS mask-layout synthesis [3]{[6]. These design synthesis methods are iterative searches in which each iteration consists of mask-layout modification, determination of etched shape via an arbitrary 3-D etch simulator, and similarity evaluations between the etched shape and the desired shape, which is used to guide modification. The work described here differs from previous work in that a framework is developed for mask-layout synthesis that implements level set methods as the 3-D etch simulator.

ISBN: 0-9708275-0-4
Pages: 638