Authors: B. Baidya, K. He and T. Mukherjee
Affilation: Carnegie Mellon, United States
Pages: 426 - 429
Keywords: DRC, slotting, CMOS micromachining, micro-loading, slot hole shields, density requirement
The advent of CMOS micromachining has introduced new design rules for fabrication of integrated CMOS-MEMS devices. This paper presents a context dependent DRC algorithm to handle the issues related to pre-fabrication verification of such layouts. In addition, problems related to density control, specific to CMOS-MEMS designs, are discussed. An automatic slotter which introduces MEMS-compatible slot holes is presented and its capability demonstrated. Having such verification and correction tools which address the needs of integrated CMOS-MEMS designs will help reduce inte-grated MEMS design time.
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